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Samco Inc.
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Samco Inc.
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Search:
  • Products
    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
    • Surface Treatment Systems
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Processes
    • Deposition
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching
      • Atomic Layer Etching (ALE)
      • Compound Semiconductor Etching
        • GaN Etching
        • GaAs Etching
        • InP Etching
      • Silicon Etching & DRIE
      • Metal/Dielectric Etching
      • Failure Analysis
    • Surface Treatment
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Markets
  • News & Events
    • Events
    • News
    • Disclosure
    • Technical Reports
    • Interviews
    • Tutorials
  • About
    • Company Overview
    • Global Locations
    • History
  • Contact
    • Product Info Request
    • Technical Support Request
    • Careers

News & Events

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Latest News

Chairman Osamu Tsuji Awarded Honorary Doctorate by Kyoto Institute of Technology

Chairman Osamu Tsuji Awarded Honorary Doctorate by Kyoto Institute of Technology

NewsDecember 12, 2025
Samco Now 131 Technical Report: Atomic-Level Etch Control - Introduction to Atomic Layer Etching (ALE) Systems

Atomic Layer Etching Control – Intro to ALE Systems

Technical reportsOctober 10, 2025
Photo of Professor Akiyoshi Baba from Kyutech

Kyushu Institute of Technology: Professor Akiyoshi Baba

InterviewsOctober 9, 2025

University of Adelaide to Install RIE-400iP-ALE as Australia’s First ALE System

NewsOctober 1, 2025
Attendees of "4 Decades of Plasma CVD & ALD" Invited Lecture held by Osamu Tsuji at IIT Delhi

Invited Lecture at IIT Delhi Delivered by Samco Inc. Founder Osamu Tsuji

NewsSeptember 13, 2025

Samco Inc. Completes Construction of New Advanced Technology Development Center

NewsSeptember 1, 2025
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