Aqua Plasma® Cleaners (AQ-Series) are a lineup of plasma processing equipment that mainly uses water vapor (H₂O). These systems can perform safe and environmentally friendly surface treatments such as oxide reduction, organic contaminants cleaning, resin bonding, and superhydrophilization.
Aqua Plasma® Cleaners Lineup
Key Features & Benefits
- Safe reduction and cleaning of metal oxide film by Aqua Plasma®
- Built-in automatic control system for water vapor generation and supply volume
- Space-saving design
- Reduction, modification and cleaning of silver and copper electrodes
- Room temperature bonding of dissimilar materials
- Surface modification of resin
Applications
The AQ-Series are plasma cleaners specially designed for Aqua Plasma treatment which uses H2O as process gas. These systems are capable of polymer surface treatment and bonding for microfluidics fabrication. Furthermore, the system offers metal surface cleaning without surface oxidation and redeposition which are typical process challenges in conventional O2 or Ar plasma treatment. The unique process is suitable for copper/silver leadframe and electrode cleaning in microelectronics packaging.