⌀240 mm
Cassette Loading
none
Carrier Tray Transfer
Production system with dual cassettes
The UV-300HC is a high performance and cassette loading UV ozone cleaner for production. This industry-leading system has 2 loading cassettes and can achieve high ashing rates of 200-300 nm / min. This system uses a unique combination of ultraviolet irradiation, high concentration of ozone, and controlled stage heating to gently, yet effectively, remove organic materials from a variety of substrates, including silicon, glass, compound semiconductors (GaN, SiC, GaAs, and InP), sapphire, ceramics, etc.
Key Features & Benefits
- Processing up to ø240 mm (ø3″ x 5, ø4″ x 3, ø8″ x 1)
- High ashing rates of 200 – 300 nm/min
- Heating stage accelerates the cleaning rates and realizes a broad process temperature range
- Gap adjustment between the stage and the quartz diffusion plate enables uniformity improvement over the substrate
- Compact, uses minimum cleanroom space
- Easy, operates at atmospheric pressure – no vacuum system required
- Soft, completely dry process will not cause electrical damage to substrates
- Built-in ozone catalyst unit for reducing ozone concentration in the exhaust to a safe level
- Built to UL standards
Applications
- Surface cleaning of plastic packages and lead-frames
- Surface cleaning of compound semiconductor (GaN, SiC, GaAs, and InP)
- Surface modification (wettability and adhesion improvement)
- Surface oxidation (thin oxidized layer deposition)
- Photoresist ashing, stripping, and descuming
- Removal of organic contaminants
- UV curing
