320 x 230 mm
Open Load
Aqua Plasma™
none

Compact system for R&D

The AQ-500 is a compact Aqua Plasma® cleaning system, ideal for R&D applications. Using H₂O as the process gas, it enables safe, eco-friendly surface treatments, including reduction of metal oxide films, cleaning of organic stains, resin bonding, and superhydrophilization. Its optimized design ensures reliable performance for samples up to 320 x 230 mm.

Key Features & Benefits

  • Safe reduction and cleaning of metal oxide films using Aqua Plasma® technology.
  • Built-in automatic control system for precise water vapor generation and supply.
  • Compact design optimized for R&D spaces (540 mm (W) x 650 mm (D)).

Applications

  • Reduction, cleaning, and modification of silver and copper electrodes.
  • Room-temperature bonding of dissimilar materials.
  • Surface modification of resins, including superhydrophilization.

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406 x 413 mm
Open Load
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none