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Scallop-free sidewalls
Comb-shape arrays with nanoscale-gap were fabricated for a MEMS capacitive accelerometer.
The etched profile showed vertical scallop-free sidewalls.
Etch Depth : 4.5 µm
Pattern Width : 0.3 µm
Aspect Ratio : 15
Photo courtesy of Tabata/Tsuchiya Lab, Kyoto University.