High-reliability MEMS micromirror with Si nanowires

This MEMS micromirror device scans space by altering the laser angle, offering high reliability through a top-down fabrication process. Using this method, thin silicon nanowires are integrated with a thick mirror surface in a single piece, enhancing durability. The compact mirror design and array placement improve performance, making it suitable for high-precision optical applications.

Photo courtesy of Nano/Micro System Lab, Kyoto University

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