High-reliability MEMS micromirror with Si nanowires
This MEMS micromirror device scans space by altering the laser angle, offering high reliability through a top-down fabrication process. Using this method, thin silicon nanowires are integrated with a thick mirror surface in a single piece, enhancing durability. The compact mirror design and array placement improve performance, making it suitable for high-precision optical applications.
Photo courtesy of Nano/Micro System Lab, Kyoto University