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Using liquid source SN-2 with cathode PECVD
A high Q-value SiNx ring resonator with a Q factor of 2.4 x 10⁵ and a compact ring radius of 100 μm has been successfully fabricated using liquid source SN-2. Leveraging SiNx’s high refractive index of approximately 2.0, precise control of the Si-to-N ratio was achieved with the PD-200STL Cathode PECVD system, yielding a target refractive index of 1.99. Anisotropic etching for the resonator was performed using the RIE-400iP ICP etching system. This advanced fabrication enables the development of compact, high-performance optical filters with enhanced light extraction efficiency. (Photo courtesy of Yokoyama Lab, Kyushu University)