
Products
High aspect ratio coverage with AlOx film
AlOx film was deposited on trench patterns, demonstrating conformal step coverage along the sidewalls and bottom.
- Open area: 1.78 µm
- Trench depth: 71.8 µm
- Aspect ratio: 40.3
AlOx film was deposited on trench patterns, demonstrating conformal step coverage along the sidewalls and bottom.