Samco’s Surface Treatment Systems provide comprehensive cleaning solutions tailored to ensure the highest quality and consistency in surface preparation. Using advanced plasma and UV ozone techniques, these systems remove organic and inorganic contaminants, enabling optimal adhesion and performance of films and coatings.
Our Aqua Plasma® Cleaners leverage environmentally friendly water vapor plasma to reduce oxides, remove organic residues, and enhance hydrophilic properties. Plasma Cleaning Systems offer flexible batch processing for various materials and applications, from R&D to large-scale production. For substrates requiring gentle, residue-free treatment, our UV Ozone Cleaning Systems utilize a combination of UV light, ozone, and stage heating, providing thorough cleaning for materials like silicon, glass, and compound semiconductors.
Aqua Plasma® Cleaners
Aqua Plasma® Cleaners are a lineup of plasma processing equipment that mainly uses water vapor (H₂O). These systems can perform safe and environmentally friendly surface treatments such as oxide reduction, organic contaminants cleaning, resin bonding, and superhydrophilization.
Plasma Cleaning Systems
Samco’s Plasma Cleaners are parallel-plate systems capable of cleaning organic and inorganic contamination from the surface of samples. The process chamber allows the user to install multiple electrode shelves, and the flexibility of the shelf electrode configuration supports batch processing of a wide range of products, from research to high volume production.
UV Ozone Cleaning Systems
Samco’s UV Ozone Cleaners use a unique combination of ultraviolet irradiation, ozone, and stage heating to gently, yet effectively, remove organic materials from a variety of substrates, including silicon, glass, compound semiconductors (GaN, SiC, GaAs, and InP), sapphire, ceramics, and more. Today our product line includes compact benchtop and cassette type systems for both R&D and mass production customers.