A Better Tommorow Driven by Thin Film Technology

Thin film technology is a manufacturing process used to create very thin coatings of various materials on a substrate or surface. The coatings, or “films,” can range from a few nanometers to several micrometers in thickness. Samco manufactures Chemical Vapor Deposition (CVD) equipment for fabricating thin films, dry etching equipment for the selective removal of layers of thin films, as well as dry cleaning equipment for the removal of impurities from the surfaces of thin films.

Who We Are

Samco was established in 1979 with the objective of offering state-of-the-art semiconductor and electronic component manufacturing systems to its global clientele. What initially started as a garage start-up in a corner of Kyoto has today metamorphosed into a global corporation, equipped with state-of-the-art technological competencies and business locations across the globe. The appellation of the firm, “Samco,” constitutes a contraction of “Semiconductor And Materials COmpany,” which accurately mirrors the company’s exceptional advancements in the compound semiconductors and materials science fields. Since its inception, Samco has actively pursued research and development in compound semiconductor materials, and have delivered an abundance of inventive solutions to the materials science field around the world. Currently, semiconductors and electronic components have emerged as indispensable foundational constituents across all industries, and are initiating significant transformations in our lives. Samco is committed to staying devoted to the electronics sector, which encompasses semiconductors and electronic components, while concurrently diversifying our business into the life sciences and healthcare sectors, with the objective of enriching people’s lives.

Samco is committed to further growth and maximizing its corporate value by prioritizing “thin-film technology” as its core area of expertise. In order to satisfy the trust and expectations of our stakeholders, we are dedicated to fulfilling our social responsibility through our business activities and contributing to the achievement of a society that inspires dreams and the advancement of industrial science on a global scale. We eagerly anticipate your sustained support in the coming times.

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What We Do

Since our founding in 1979, Samco has been at the forefront of advancing semiconductor processing technology. We specialize in three core areas: Chemical Vapor Deposition (CVD), Dry Etching, and Dry Cleaning. Our CVD systems are engineered for high-speed thin film deposition, protecting semiconductors from environmental damage and enhancing insulation. Our dry etching technology is pivotal for the precise microfabrication of compound semiconductors, including cutting-edge materials like GaN and SiC. Our dry cleaning systems, featuring Aqua Plasma and UV ozone cleaners, ensure thorough surface preparation and impurity removal.

Samco’s commitment to innovation and excellence enables us to deliver state-of-the-art solutions tailored to diverse applications. Explore our processes, products, markets, and latest news to learn more about how we are shaping the future of semiconductor technology. For career opportunities and corporate information, visit our careers and disclosure pages.

Core Technologies

Samco provides solutions for deposition, etching, and surface treatment.

CVD systems facilitate the deposition of thin films by introducing reactive gases onto semiconductor substrates and instigating chemical reactions through plasma or other pertinent techniques. Their primary function is to safeguard semiconductors against the detrimental effects of moisture and dust and to endow them with insulation. The liquid source CVD® process developed by Samco employs proprietary raw materials and boasts of its remarkable ability to achieve high-speed deposition at reduced temperatures.

Dry etching systems are utilized for the microfabrication of thin films on semiconductor substrates. The process encompasses the plasma decomposition of reactive gas that reacts with the target material on the semiconductor substrate, resulting in etching. Samco specializes in the processing of compound semiconductors, comprising multiple elements. Additionally, it can process gallium nitride (GaN) and silicon carbide (SiC), which are materials for next-generation power devices.

Dry cleaning systems clean the surfaces of semiconductor substrates by releasing reactive gases as plasma in a vacuum. Our exclusive Aqua Plasma has been utilized in a broad range of applications, including the surface reduction of silver and copper, as well as the bonding of resins. Additionally, we have ultraviolet (UV) ozone (O3) cleaners that utilize UV light, ozone, and stage heating for ashing and surface treatment.

Leadership

Chairman & Chief Executive Officer
Osamu Tsuji

Osamu Tsuji is the founder of Samco. Before starting Samco in September 1979, he worked as a research scientist at NASA Ames Research Center. He is a firm believer of the “Kyoto-style” corporate management, manufacturing philosophy and technology innovation. With this belief, Mr. Tsuji has grown Samco into a multinational corporation offering leading edge process solutions.

Mr. Tsuji has dedicated his effort to technology development of plasma processing for over 40 years. In 2012, he was named Conference and Organizing Committee Chairperson of the 11th Asia Pacific Conference on Plasma Science and Technology (APCPST 2012) Conference. For his contribution to the plasma processing technology, in 2013, he received 15th Special Award of Plasma Science for Material from 153rd Plasma Science for Material Committee, Japan Society for the Promotion of Science. He is the first award winner from industry sector. He has also published 70 papers and co-edited 4 books.
While serving as Chairman and Chief Executive Officer of Samco, Mr. Tsuji has dedicated his passion to energize business ventures in Japan. He is serving as the Chairman of Kyoto City Venture Companies Evaluation Committee and has supported many promising startups.

History

Samco started in 1979 as a venture company in a small garage of a house in Kyoto, Japan. It delivered its first Plasma Chemical Vapor Deposition product for a-Si solar cells research in the same year. From its modest beginnings, Samco has now grown into a multi-million dollar worldwide corporation with more than 200 employees delivering process solutions for both research and production to our “Partners in Progress”. Samco continues to keep its business venture spirit.