Innovation with the New Plasma Source HSTC-M™
Introduction of ICP Etching System for SiC/GaN Power Devices up to 8 Inches Samco Inc. Introduction Since the introduction of ICP etching systems in 1996, Samco has consistently delivered innovative process technology and reliable systems to the compound semiconductor market. Our proprietary Tornado ICP® coil, much like Hideo Nomo1, the first Japanese Major League Baseball…
