RIE-10NR Achieves Sales Milestone of 500 Units
In July 2023, the RIE-10NR, a capacitively coupled plasma (CCP) type reactive-ion etching (RIE) system designed for research and development purposes, achieved a significant milestone by surpassing the shipment of 500 units. Dr. Michihisa Yamamoto, Team Leader of the Quantum Electron Device Research Team at RIKEN Center for Emergent Matter Science, supervised the installation of…