Physical Property Evaluation of ZnO Thin Film Fabricated by Low-Temperature Process for Flexible Transparent TFT

Khafe, Adie Bin Mohd¹; Watanabe, Hiraku¹; Yamauchi, Hiroshi¹; Kuniyoshi, Shigekazu¹; Iizuka, Masaaki²; Sakai, Masatoshi¹; Kudo, Kazuhiro^1
1 Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
² Faculty of Education, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
Journal of Nanoscience and Nanotechnology, Volume 16, Number 4, April 2016, pp. 3168-3175(8)

Samco UV-Ozone cleaner, UV-1 was used for ultraviolet/ozone (UV-O₃) assisted thermal treatments on wet processed zinc oxide field effect transistor (ZnO-FET) to improve drain current and mobility of the ZnO-based device. They found that UV-Ozone treatment eliminated carbon impurities in ZnO thin film and improved the performance of ZnO-FET.