Sunnyvale, CA —  SAMCO Inc., a pioneer in plasma etch and PECVD process equipment for over 30 years, recently received an order from the Princeton Institute for the Science and Technology of Materials (PRISM) for its ICP etching and silicon DRIE systems.

PRISM was formed in 2003 at Princeton University as a multidisciplinary research center in the general field of material sciences through photonics, with emphasis on hard/soft material interfaces. The SAMCO RIE-200iP and RIE-800iPB systems will be housed in PRISM’s 5,000-square-foot Micro/Nano Fabrication Cleanroom, which is used for the development and fabrication of III-V materials, semiconductors, micro fluidics, MEMS and other nano-scale devices.
Professor James Sturm, Ph.D, Director of PRISM at Princeton University, and Dr. Watson Ph.D, Director of the Micro/Nano Fabrication Laboratory were responsible for the purchase of the two SAMCO etching systems.  Professor Sturm has over 20 years of experience in the fields of semiconductor devices, physics, and integrated circuit fabrication. Dr. Watson has over 25 years of industry research and development experience in Silicon MEMS and III-V optoelectronic devices.  

“We are very pleased to receive this order from such a prestigious institution. We look forward to working with the PRISM team and providing them with the superior service and process support for which SAMCO is known for”, stated Peter Wood, Director of US Operations for SAMCO Inc.

Go to Princeton Institute for the Science and Technology of Materials (PRISM)