SAMCO PD-2203L for High-Efficiency Silicon Solar Cell Research
In accordance with the “Basic Guidelines for Reconstruction in Response to the Great East Japan Earthquake” (determined on July 29, 2011) and the “Basic Policy for Recovery and Reconstruction of Fukushima” (passed on July 13, 2012), the FUTURE-PV (Fukushima Top-Level United Center for Renewable Energy Research-Photo Voltaic Innovation) Research Facility has been established in Fukushima Prefecture as a 5-year project from 2012 to 2016. The research at this facility will be supervised by Professor Makoto Konagai of the Department of Physical Electronics, Graduate School of Science and Engineering, Tokyo Institute of Technology.
Due to collaborative effort of the Reconstruction Agency, the Ministry of Education, Culture, Sports, Science and Technology (MEXT), the Ministry of Economy, Trade and Industry (METI), and the Japan Science and Technology Agency (JST), FUTURE-PV is now the world’s most advanced R&D facility for renewable energy. Research aimed at developing super-efficient, innovative solar cells is being conducted.
SAMCO has developed solutions for research and development of solar cells since the its establishment, and possesses a distinct delivery record of plasma CVD systems. Additionally, SAMCO’s multi-chamber and cluster-type systems have been highly evaluated. The current project at FUTURE-PV centers on the realization of silicon solar cells that have more than 30% energy conversion efficiency. In light of this project, SAMCO has received an order for the PD-2203L cluster-type PECVD system for the deposition of hydrogenated amorphous silicon (a-Si:H) layers which are used in hetero-junction type crystal silicon solar cells. The SAMCO PD-2203L cluster system is being housed temporarily at the Tokyo Institute of Technology until the preparation of the FUTURE-PV R&D facility in Fukushima is complete.
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Anode PECVD Systems
Cathode PECVD Systems