Samco holds a booth at MEMS 2017 conference at Las Vegas, USA.

Date : January 22 – 26, 2017
Location : Rio Las Vegas Hotel and Casino, Las Vegas, US
Booth : 5

We will show our latest updates on MEMS device processing technologies.
· Deep silicon etching (the Bosch process) for MEMS structure fabrication
· Fine and nano-scale dry etching technologies (RIE and ICP-RIE) of various materials
– silicon, SiO₂, III-V, metals, polymers and other materials
· PECVD technologies (SiO₂ and SiN_x) for hark mask fabrication
· Plasma cleaners and UV-ozone cleaners for photoresist ashing, surface cleaning and modification
· XeF₂ etching system for reliable dry release of MEMS structure

If you are interested in discussion on our process technologies and capabilities, please visit our booth (No. 5).

Go to MEMS 2017 website