Scientific Paper on ITO-based MEMS Sensor from AIST and the University of Tokyo

ITO-Based MEMS Sensor Electrode for Dynamic Cow-Rumen pH Sensing

Lan Zhang¹, Jian Lu¹, Hirofumi Nogami^{1, 2}, Hironao Okada², Toshihiro Itoh^{1, 3}

¹ Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST)
² Department of Mechanical Engineering, Kyushu University
³ Department of Human and Engineered Environmental Studies, the University of Tokyo
IEEJ Transactions on Sensors and Micromachines (2016) 136, No. 11 P 482-487
A PH sensor was fabricated combining a metal-oxide-semiconductor field-effect transistor (MOSFET) with a separate sensing electrode made of indium tin oxide (ITO) film. Samco RIE etch system was used for plasma etching of an amorphous fluoropolymer CYTOP fluoropolymer film in device fabrication.