On-chip cell analysis platform: Implementation of contact fluorescence microscopy in microfluidic chips

Hiroaki Takehara¹, Osawa Kazutaka², Makito Haruta², Toshihiko Noda², Kiyotaka Sasagawa², Takashi Tokuda² and Jun Ohta^2
1 Department of Materials Engineering, Graduate School of Engineering, The University of Tokyo, 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan
² Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
AIP Advances 7, 095213 (2017)

In this research, on-chip cell analysis platform for integrating contact fluorescence microscopy was performed using microfluidic chips. In microfluidic device fabrication, PDMS and ultra-thin glass substrates were bonded using exposure to oxygen plasma. Samco RIE etcher was used for oxygen plasma treatment of the substrates.

Samco offers plasma treatment technologies for microfluidics fabrication. Unique plasma processes enable plasma bonding of substrates such as COP and glass without microchannel pattern collapse because there is no need to implement mechanical pressing and heating for bonding. For more details, please visit the process page below.
Plasma Treatment & Bonding for Polymer Microfluidics