A VHF temperature compensated lithium niobate-on-oxide resonator with Q > 3900 for low phase noise oscillators

Grace W. Fang^a, Gayathri Pillai^b, Ming-Huang Li^c, Chun-You Liu^a, Sheng-Shian Li^a
a Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
^b Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan
^c MNTL, University of Illinois at Urbana Champaign, Urbana, IL, USA

2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, 2018, pp. 723-726.

LiNbO₃-based resonator with high Q over 3900 was fabricated in this research. Samco Reactive Ion Etching Tool was used for LiNbO₃ etching with SiO₂ in chlorine-based chemistry.

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Plasma Etching & PECVD Process Data