SAMCO presented a paper at the 19th International Symposium of Plasma Chemistry in Bochum, Germany, titled “Deposition and Characterization of Silicon Carbon Nitride films prepared by RF-PECVD with Capacitive Coupling.
Professor Ikuo Suemune, Hokkaido University is a proud customer of SAMCO RIE system, ICP etching system and PECVD system.
He talks about his research in nano-photonics and the relationship between the research field and SAMCO’s technologies.
University of Delaware is a proud customer of SAMCO ICP etching systems, RIE-200iP and PECVD System, PD-220N. We received testimonial from Dr. Dennis Prather. He is using the SAMCO systems for his research in nano-photonic devices.