Physical Property Evaluation of ZnO Thin Film Fabricated by Low-Temperature Process for Flexible Transparent TFT

Khafe, Adie Bin Mohd¹; Watanabe, Hiraku¹; Yamauchi, Hiroshi¹; Kuniyoshi, Shigekazu¹; Iizuka, Masaaki²; Sakai, Masatoshi¹; Kudo, Kazuhiro^1
1 Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
² Faculty of Education, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
Journal of Nanoscience and Nanotechnology, Volume 16, Number 4, April 2016, pp. 3168-3175(8)

Samco UV-Ozone cleaner, UV-1 was used for ultraviolet/ozone (UV-O₃) assisted thermal treatments on wet processed zinc oxide field effect transistor (ZnO-FET) to improve drain current and mobility of the ZnO-based device. They found that UV-Ozone treatment eliminated carbon impurities in ZnO thin film and improved the performance of ZnO-FET.

Surface fluorination of rutile-TiO₂ thin films deposited by reactive sputtering for accelerating response of optically driven capillary effect

Taizo Kobayashi¹, Hironobu Maeda², and Satoshi Konishi^3
1 Ritsumeikan-Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
² Graduate School of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
³ Department of Mechanical Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
Japanese Journal of Applied Physics 55, 06GP03 (2016)

TiO₂ thin films with the rutile phase were fluorinated using Samco RIE system to enhance the photoresponsivity.

Optically and electrically excited emissions from organic semiconducting oligomer crystals

Shu Hotta
Faculty of Materials Science and Engineering, Kyoto Institute of Technology, Sakyo-ku, Kyoto, Japan
Polymer International 2016

Samco ICP etch system was used for PDMS mold fabrication to etch away UV-curable photoresist.

Athermal Hybrid Silicon/Polymer Ring Resonator Electro-optic Modulator

Feng Qiu¹, Andrew M. Spring¹, Hiroki Miura², Daisuke Maeda³, Masa-aki Ozawa³, Keisuke Odoi³, and Shiyoshi Yokoyama^{1, 2
1} Institute for Materials Chemistry and Engineering, Kyushu University, 6-1 Kasuga-koen Kasuga-city, Fukuoka 816-8580, Japan
² Department of Molecular and Material Sciences, Kyushu University, 6-1 Kasuga-koen Kasuga-city, Fukuoka 816-8580, Japan
³ Nissan Chemical Industries, LTD, 2-10-1 Tuboi Nishi, Funabashi, Chiba 274-8507, Japan
ACS Photonics
DOI: 10.1021/acsphotonics.5b00695

Silicon plasma etching was performed using Samco silicon DRIE system to fabricate a hybrid silicon/polymer ring resonator electro-optic (EO) modulator.
For our process examples of silicon plasma etching, please visit process data page below.
Si Dry Etching Process (RIE, ICP-RIE or XeF₂ Etch)
Deep Silicon Trench/Via Hole Etching using Bosch Process
Si DRIE (Deep Reactive Ion Etching) for MEMS and TSV

Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography

Satoshi Takei and Makoto Hanabata
Toyama Prefectural University, Imizu, Toyama 939-0398, Japan
Appl. Phys. Express (2016) 9 056501

Samco tabletop Reactive Ion Etching (RIE) System was used for evaluation of resist materials on plasma etch selectivity. Resin etching process was performed using fluorine chemistry.

Unexpected Effects of the Rate of Deposition on the Mode of Growth and Morphology of Thin Films of Tetracene Grown on SiO₂

R. K. Nahm and J. R. Engstrom
School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, United States
J. Phys. Chem. C, 2016, 120 (13), pp 7183–7191
DOI: 10.1021/acs.jpcc.6b00963

Samco UV-Ozone cleaner at Cornell University was used for sample preparation before tetracene growth.

Samco is employing around 20 more people at its locations in North America, China, Taiwan and Singapore, as well as its subsidiary Samco-UCP in Liechtenstein, in order to better provide services and support to overseas customers.

“Increasing the number of Samco employees abroad is part of the company’s larger strategy to optimize our current sales structure while actively growing our customer base across the globe,” says Osamu Tsuji, Samco’s President, Chairman and CEO.

This Samco-Interview features Professor V. Ramgopal Rao of the Electrical Engineering Department at the Indian Institute of Technology Bombay, who was a keynote speaker at the Samco MEMS Workshop in February.  We asked him to talk to us about his MEMS (Micro Electro Mechanical Systems) research.

Top-Down Nanofabrication and Characterization of 20 nm Silicon Nanowires for Biosensing Applications

M. Nuzaihan M. N ¹, U. Hashim^1,2, M. K. Md Arshad^1,2, A. Rahim Ruslinda¹, S.F.A. Rahman³, M. F. M. Fathil¹, Mohd. H. Ismail^2
1 Institute of Nano Electronic Engineering, Universiti Malaysia Perlis, 01000 Kangar, Perlis, Malaysia,
² School of Microelectronic Engineering, Universiti Malaysia Perlis (UniMAP), 02600 Pauh, Perlis, Malaysia,
³ Chemistry Department, Faculty of Science, Universiti Putra Malaysia, 43400 UPM Serdang, Selangor, Malaysia
PLoS ONE 11(3): e0152318. doi:10.1371/journal.pone.0152318

Samco ICP etch system at Universiti Malaysia Perlis was used for anisotropic etching of silicon for silicon nanowires fabrication.
For our process examples of silicon dry etching, please visit the process data page below.
Si Dry Etching Process (RIE, ICP-RIE or XeF₂ Etch)

An Extended-gate Type Organic FET Based Biosensor for Detecting Biogenic Amines in Aqueous Solution

Tsuyoshi MINAMI, Tsubasa SATO, Tsukuru MINAMIKI, and Shizuo TOKITO
Research Center for Organic Electronics (ROEL), Graduate School of Science and Engineering, Yamagata
University, 4-3-16 Jonan, Yonezawa, Yamagata 992–8510, Japan
Analytical Sciences (2015) 31

An organic field-effect transistor (OFET) was fabricated for detection of biogenic amines in an aqueous solution. In device fabrication, Samco Plasma Cleaner PC-300 was used for oxygen plasma treatment of metal electrodes for surface cleaning.

For more details of our plasma cleaners, please visit the product page below.
Plasma Cleaners