SAMCO has developed and released a high-density plasma etching system, the “RIE-331iPC”, to meet the demands of the Asian markets. We will introduce the RIE-331iPC at SEMICON Japan 2011, to be held at Makuhari Messe on December 7th.

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Investigating GaSb(001) Dry Etching by ICP-RIE on a non-Silicon Containing Sample Holder with no Organic Gases

Hamad A. Albrithen¹, Gale S. Petrich², Leslie A. Kolodziejski³, Abdelmajid Salhi⁴ and Abdulrahman A. Almuhanna^4
1 Physics and Astronomy, KAIN, King Saud University, Riyadh, Riyadh, Saudi Arabia.
² Research Laboratory of Electronics, MIT, Cambridge, Massachusetts.
³ Department of Electrical Engineering and Computer Science, MIT, Cambridge, Massachusetts.
⁴ National Center for Nano Technology Research, King Abdulaziz City for Science and Technology, Riyadh, Riyadh, Saudi Arabia.
MRS Proceedings 2012 1396, mrsf11-1396-o07-33
doi:10.1557/opl.2012.775.

GaSb plasma etching process over SiO₂ mask was investigated using Samco ICP etch system.
Anisotropic GaSb etching with smooth sidewalls were achieved with the recipe optimization.

For more details of our GaSb plasma etching capabilities, please visit the process data page below.
GaSb Plasma Etching

Fabrication of Vertically Aligned Diamond Whiskers from Highly Boron-Doped Diamond by Oxygen Plasma Etching

Chiaki Terashima¹, Kazuki Arihara⁴, Sohei Okazaki⁴, Tetsuya Shichi⁴, Donald A. Tryk⁵, Tatsuru Shirafuji², Nagahiro Saito^{1, 2, 3}, Osamu Takai^{1, 2, 3}, and Akira Fujishima^{4, 6
1} Research Center for Materials Backcasting Technology, Graduate School of Engineering, and ²Department of Materials, Physics and Energy Engineering, Graduate School of Engineering, ³ EcoTopia Science Institute, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
⁴ Technology Research and Development Department, General Technology Division, Central Japan Railway, 1545-33 Ohyama, Komaki City, Aichi 485-0801, Japan
⁵ Fuel Cell Nanomaterials Center, University of Yamanashi, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
⁶ Tokyo University of Science, 1-3 Kagurazaka, Shinjyuku-ku, Tokyo 162-8601, Japan
ACS Appl. Mater. Interfaces, 2011, 3 (2), pp 177–182
DOI: 10.1021/am1007722

Samco open-load Plasma Etching System was used for diamond plasma etching to fabricate vertically aligned diamond whiskers.

For more details of our diamond plasma etching technologies, please visit the diamond process data page below.
Diamond Dry Etching Process (RIE or ICP-RIE)

We at SAMCO extend our sincere condolences to all those affected by the massive flooding in Thailand; our thoughts go out to the victims and their families.

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On July 7, 2011, the SAMCO Inc. board of directors approved a stock split (six-for-five) for SAMCO Inc. stock. Each shareholder of record at the close of business on July 31, 2011 will receive one additional share for every 5 outstanding shares held on the record date. Cash will be paid in lieu of fractional shares.

SAMCO has established a fund for SAMCO members’ volunteer activities to support people stricken by the Tohoku earthquake and tsunami. During the holiday (from April 29th to May 5th, 2011), several employees participated in volunteer activities such as cleaning debris and distributing supplies. SAMCO will continue to support people in the disaster affected area.

SAMCO held the nitride semiconductor and material science technical seminar on April 15th, 2011 at Beijing University.The seminar was held with the support by Nitride Semiconductor Centre Research of Beijing University, and we had 6 top researchers and engineers give the lectures. More than 80 researchers and engineers participated in the seminar and discussions; the seminar was successfully completed after we agreed to hold another thin film technology seminar in China.

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Professor Kuzuhara at Graduate School of Electrical and Electronics Engineering, University of Fukui is a proud customer of SAMCO ICP Etching System RIE-200iP.  He talks about his research in III-Nitride Transistors and its perspectives.

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SAMCO’s sales office in Sendai has reopened on Monday, April 4, 2011, for the first time since its closure on March 11, 2011 due to the earthquake.  We at SAMCO will do our best to help our customers in the earthquake-affected areas recover from the damage as quickly as possible.