Micro-fabricated Si subwavelength grating for frequency-domain THz beam steering covering the 0.3–0.5 THz frequency band

Kohei Chiba, Taiyu Okatani, Naoki Inomata, and Yoshiaki Kanamori

Graduate School of Engineering, Department of Robotics, Tohoku University, 6-6-01 Aoba, Aramaki,
Aoba-ku, Sendai, Miyagi, Japan

Opt. Express 31, 27147-27160 (2023)

Samco PECVD system PD-100ST was used for SiO₂ film deposition using TEOS.

Pinhole electrical conductivity in polycrystalline Si on locally etched SiNy/SiOx passivating contacts for Si solar cells

C.L. Anderson ^{a b}, H.L. Guthrey ^b, W. Nemeth ^b, C.-S. Jiang ^b, M.R. Page ^b, P. Stradins ^{a b}, S. Agarwal ^{a b}

^a
Department of Chemical and Biological Engineering, Colorado School of Mines, Golden, CO, 80401, USA
^b
National Renewable Energy Laboratory, Golden, CO, 80401, USA

Materials Science in Semiconductor Processing, Volume 165, 2023, 107655,
ISSN 1369-8001,
https://doi.org/10.1016/j.mssp.2023.107655.

Boron-doped polycrystalline Si on locally etched silicon nitride/silicon oxide (PLENO) passivating contacts was studied for monocrystalline Si (c-Si) solar cell application. Samco open-load RIE system RIE-10NR was used for silicon etching.

Samco will have a booth at 6th Photonic Integration Week conference at at the Universitat Politècnica de València Campus from 20th to 22nd March, 2023.

Please feel free to visit us to know about latest plasma etching, deposition and surface treatment technologies for III-V and silicon photonic device fabrication.

Photonic Integration Week website

Textured and Rigid Capillary Materials for Passive Energy-Conversion Devices

Alberghini, M., Morciano, M., Giardino, M., Perrucci, F., Scaltrito, L., Janner, D., Chiavazzo, E., Fasano, M., Asinari, P., Textured and Rigid Capillary Materials for Passive Energy-Conversion Devices. Adv. Mater. Interfaces 2022, 2200057. https://doi.org/10.1002/admi.202200057

Samco RIE system RIE-10NR was used for oxygen plasma treatment for surface functionalization in fabrication of passive energy-conversion devices.

Scalable Fabrication of Nanogratings on GaP for Efficient Diffraction of Near-Infrared Pulses and Enhanced Terahertz Generation by Optical Rectification

Mohammad Bashirpour¹, Wei Cui¹, Angela Gamouras^1,2 and Jean-Michel Ménard^1,2
1 Department of Physics, University of Ottawa, Ottawa, ON K1N 7N9, Canada
² National Research Council Canada, Ottawa, ON K1A 0R6, Canada
Crystals 2022, 12, 684. https://doi.org/10.3390/cryst12050684

Samco RIE system RIE-10NR was used for SiO2 hardmask patterning using photoresist mask. Then, Samco ICP-RIE system was used for GaP etching using the SiO2 hardmask for wafer-scale fabrication of a surface phase grating with submicron feature sizes.

Functional analysis of human brain endothelium using a microfluidic device integrating a cell culture insert

Shigenori Miura¹, Yuya Morimoto², Tomomi Furihata³ and Takeuchi^1,2,4
1 Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
² Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Tokyo, Japan
³ Laboratory of Clinical Pharmacy and Experimental Therapeutics, School of Pharmacy, Tokyo University of Pharmacy and Life Sciences, Tokyo, Japan
⁴ International Research Center for Neurointelligence (WPI-IRCN), The University of Tokyo Institutes for Advanced Study (UTIAS), The University of Tokyo, Tokyo, Japan
APL Bioengineering 6, 016103 (2022); https://doi.org/10.1063/5.0085564

Aqua Plasma Treatment was used for PDMS/PDMS bonding microfluidic device fabrication. Samco Aqua Plasma technology for polymer surface activation and bonding without adhesives can be found in the following webpage.

Plasma Treatment & Bonding for Polymer Microfluidics

Symmetrically Ion-Gated In-Plane Metal-Oxide Transistors
for Highly Sensitive and Low-Voltage Driven Bioelectronics

Jingu Kang^a), Young-Woo Jang^a), Sang Hee Moon^a), Youngjin Kang^b), Jaehyun Kim^c), Yong-Hoon Kim^b), Sung Kyu Park^a)
a) School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Korea
^b) School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, Korea
^c) Department of Chemistry and Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
Adv. Sci. 2022, 2103275. https://doi.org/10.1002/advs.202103275

Samco UV-Ozone cleaner UV-1 was used for surface treatment of aluminum to form a monolithic Al₂O₃ layer in fabrication of metal-oxide transistors with amorphous indium-gallium-zinc oxide (a-IGZO).

A Low Temperature Processed, Soft-fluidic OEGFET Saliva Aptasensor for Cortisol

Roslyn S. Massey and Ravi Prakash
Department of Electronics Engineering, Carleton University, Ottawa, ON K1S 5B6, Canada;
IEEE Journal on Flexible Electronics, 1 – 1, 2022

Samco UV-Ozone cleaner UV-1 was used for PMMA surface treatment in biosensor fabrication.

Effect of oxygen terminated surface of boron-doped diamond thin-film electrode on seawater salinity sensing

Dan Shi ^a,b, Lusheng Liu ^a, Zhaofeng Zhai ^a, Bin Chen ^a,b, Zhigang Lu ^a,b, Chuyan Zhang ^a,c, Ziyao Yuan ^a,b, Meiqi Zhou ^a,b, Bing Yang ^a , Nan Huang ^a and Xin Jiang ^a,c
a Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China
^b School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, China
^c Institute of Materials Engineering, University of Siegen, Paul-Bonatz-Str. 9-11, Siegen, 57076, Germany
Journal of Materials Science & Technology, Volume 86, Pages 1-10 (2021)

Boron-doped diamond is an interesting material for sensing application. Samco open-load RIE system RIE-10NR was used for patterning and surface treatment in oxygen plasma.

A Platform for CMOS Compatible Plasmonics: High Plasmonic Quality Titanium Nitride Thin Films on Si (001) with an MgO Interlayer

Kai Ding ¹, Dhruv Fomra ¹, Alexander V. Kvit ², Hadis Morkoç ¹, Nathaniel Kinsey ¹, Ümit Özgür ¹ and Vitaliy Avrutin ^1
1 Department of Electrical and Computer Engineering, Virginia Commonwealth University, Richmond, Virginia, 23284 USA
² Materials Science Center, University of Wisconsin‐Madison, Madison, WI, 53706 USA
Advanced Photonics Research, 2000210 (2021)

A CMOS compatible hybrid-plasmonic-photonic waveguide was fabricated using TiN layer deposited by PEALD on Si (001) substrate with MgO interlayer. Samco ICP-RIE system RIE-101iPH was used for TiN/Au etching in chlorine chemistry and also Si etching in fluorine chemistry.

For more details of our ICP-RIE etch systems, please visit the product page below.
ICP-RIE Etch Systems